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Film-thickness considerations in microcantilever-beam test in measuring mechanical properties of metal thin film
Dongil Son, Jeung-hyun Jeong, Dongil KwonVolume:
437
Year:
2003
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(03)00645-x
File:
PDF, 597 KB
english, 2003