Atomic layer deposition growth of zirconium doped In2O3...

Thin Solid Films 2003 Vol. 440; Iss. 1-2

Atomic layer deposition growth of zirconium doped In2O3 films

Timo Asikainen, Mikko Ritala, Markku Leskelä
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Volume:
440
Year:
2003
Language:
english
Pages:
3
DOI:
10.1016/s0040-6090(03)00822-8
File:
PDF, 73 KB
english, 2003
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