Pulse mode effects on crystallization temperature of titanium dioxide films in pulse magnetron sputtering
Takahira Miyagi, Masayuki Kamei, Tomoyuki Ogawa, Takefumi Mitsuhashi, Atsushi Yamazaki, Tetsuya SatoVolume:
442
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00934-9
File:
PDF, 153 KB
english, 2003