Pulse mode effects on crystallization temperature of...

Pulse mode effects on crystallization temperature of titanium dioxide films in pulse magnetron sputtering

Takahira Miyagi, Masayuki Kamei, Tomoyuki Ogawa, Takefumi Mitsuhashi, Atsushi Yamazaki, Tetsuya Sato
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Volume:
442
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(03)00934-9
File:
PDF, 153 KB
english, 2003
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