Thermal oxidation of silicon in O2-SiF4 mixtures
G. Peev, T. Racheva, E. Dacheva, N. NedevVolume:
169
Year:
1989
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(89)80015-x
File:
PDF, 238 KB
english, 1989