Conductivity of boron-implanted polycrystalline thin...

Thin Solid Films 1995 Vol. 261; Iss. 1-2

Conductivity of boron-implanted polycrystalline thin silicon films

F. Mansour, M. Bouchemat, M. Boukezzata, N.H. Touidjen, D. Bielle-Daspet, K. Mirouh
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Volume:
261
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(94)06455-5
File:
PDF, 554 KB
english, 1995
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