Structure of epitaxial δ-NbN films deposited by cathode reactive sputtering
E.V. Shalaeva, R.S. Baryshev, M.V. Kuznetsov, B.V. MitrofanovVolume:
261
Year:
1995
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(94)06508-x
File:
PDF, 662 KB
english, 1995