![](/img/cover-not-exists.png)
AlSm and AlDy alloy thin films with low resistivity and high thermal stability for microelectronic conductor lines
Shinji Takayama, Naganori TsutsuiVolume:
289
Year:
1996
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(96)08882-7
File:
PDF, 490 KB
english, 1996