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The interaction of dimethylethylaminealane and ammonia on clean and oxidized Al(111): atomic layer growth of aluminum nitride
A Ludviksson, David W Robinson, J.W Rogers Jr.Volume:
289
Year:
1996
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(96)08896-7
File:
PDF, 631 KB
english, 1996