Analysis of AlN thin films by combining TOF-ERDA and NRB techniques
J Jokinen, P Haussalo, J Keinonen, M Ritala, D Riihelä, M LeskeläVolume:
289
Year:
1996
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(96)08927-4
File:
PDF, 607 KB
english, 1996