Lattice distortion in dry-etched Si/SiGe quantum dot array...

Thin Solid Films 1997 Vol. 294; Iss. 1-2

Lattice distortion in dry-etched Si/SiGe quantum dot array studied by 2D reciprocal space mapping using synchrotron X-ray diffraction

W.-X Ni, J Birch, Y.S Tang, K.B Joelsson, C Sotomayor-Torres, Å Kvick, G.V Hansson
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
294
Year:
1997
Pages:
4
DOI:
10.1016/s0040-6090(96)09232-2
File:
PDF, 321 KB
1997
Conversion to is in progress
Conversion to is failed