Porous silicon host matrix for deposition by atomic layer...

Porous silicon host matrix for deposition by atomic layer epitaxy

M Utriainen, S Lehto, L Niinistö, Cs Dücső, N.Q Khanh, Z.E Horváth, I Bársony, B Pécz
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Volume:
297
Year:
1997
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(96)09428-x
File:
PDF, 406 KB
english, 1997
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