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Low temperature zirconia thin film synthesis by a chemical vapour deposition process involving ZrCl4 and O2–H2–Ar microwave post-discharges. Comparison with a conventional CVD hydrolysis process
J. Gavillet, T. Belmonte, D. Hertz, H. MichelVolume:
301
Year:
1997
Language:
english
Pages:
10
DOI:
10.1016/s0040-6090(96)09526-0
File:
PDF, 298 KB
english, 1997