Ultrasonic micromachining on Al thin film using atomic...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Ultrasonic micromachining on Al thin film using atomic force microscopy combined quartz crystal resonator

Futoshi Iwata, Makoto Kawaguchi, Hisayuki Aoyama, Akira Sasaki
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Volume:
302
Year:
1997
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(96)09567-3
File:
PDF, 353 KB
english, 1997
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