Temperature dependence of lead loss in r.f. magnetron...

Thin Solid Films 1997 Vol. 302; Iss. 1-2

Temperature dependence of lead loss in r.f. magnetron sputtering of a stoichiometric Pb(Zr,Ti)O3 target

Nasir Abdul Basit, Hong Koo Kim, Jean Blachere
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Volume:
302
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(97)00004-7
File:
PDF, 631 KB
english, 1997
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