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Effects of argon and oxygen addition to the CH4-H2 feed gas on diamond synthesis by microwave plasma enhanced chemical vapor deposition
Young-Soo Han, Yoon-Kee Kim, Jai-Young LeeVolume:
310
Year:
1997
Language:
english
Pages:
8
DOI:
10.1016/s0040-6090(97)00339-8
File:
PDF, 556 KB
english, 1997