The effect of additional ion/plasma assistance in CNx-film...

The effect of additional ion/plasma assistance in CNx-film deposition based on a filtered cathodic arc

M Kühn, C Spaeth, R Pintaske, S Peter, F Richter, A Anders
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Volume:
311
Year:
1997
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(97)00470-7
File:
PDF, 145 KB
english, 1997
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