Characteristics of chemical-vapor-deposited copper on the Cu-seeded TiN substrates
Seok Kim, Doo-Jin Choi, Kyoung-Ryul Yoon, Ki-Hwan Kim, Seok-Keun KohVolume:
311
Year:
1997
Language:
english
Pages:
7
DOI:
10.1016/s0040-6090(97)00472-0
File:
PDF, 773 KB
english, 1997