Chemical instability of the target surface during DC-magnetron sputtering of ITO-coatings
P Lippens, A Segers, J Haemers, R De GryseVolume:
317
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0040-6090(97)00632-9
File:
PDF, 377 KB
english, 1998