Interelectrode separation effects on a-SiGe:H films prepared by plasma chemical vapor deposition
Jaydeep V Sali, Abduljabbar Rashad, B.R Marathe, M.G Takwale, K.D Gangurde, A.D ShaligramVolume:
322
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(97)00945-0
File:
PDF, 153 KB
english, 1998