Production of 1-m size uniform plasma by modified magnetron-typed RF discharge with a subsidiary electrode for resonance
Yuji Urano, Yunlong Li, Keiichi Kanno, Satoru Iizuka, Noriyoshi SatoVolume:
316
Year:
1998
Language:
english
Pages:
5
DOI:
10.1016/s0040-6090(98)00389-7
File:
PDF, 315 KB
english, 1998