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Optimization of growth conditions for strained Si/Si1−yCy structures
Kenneth B Joelsson, Wei-Xin Ni, Galia Pozina, Lars Hultman, Göran V HanssonVolume:
321
Year:
1998
Language:
english
Pages:
6
DOI:
10.1016/s0040-6090(98)00436-2
File:
PDF, 416 KB
english, 1998