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Characterization of TiN films prepared by rf sputtering using metal and compound targets
Midori Kawamura, Kenji Kumagai, Yoshio Abe, Katsutaka Sasaki, Hideto YanagisawaVolume:
51
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00117-1
File:
PDF, 258 KB
english, 1998