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Properties of palladium silicide thin films obtained by vacuum rapid thermal annealing of r.f. sputtered Pd films on Si
G Beshkov, DB Dimitrov, J Koprinarova, K GeshevaVolume:
51
Year:
1998
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00154-7
File:
PDF, 592 KB
english, 1998