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Measurement of outgassing characteristics from a vacuum chamber fabricated for pressure calibration in UHV/XHV region
Shingo Ichimura, Kiyohide Kokubun, Masahiro Hirata, Sonoko Tsukahara, Kzuya Saito, Yoshinao IkedaVolume:
53
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0042-207x(98)00373-x
File:
PDF, 192 KB
english, 1999