Some observations on the wear of diamond tools in ultra-precision cutting of single-crystal silicon
Jiwang Yan, Katsuo Syoji, Jun’ichi TamakiVolume:
255
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0043-1648(03)00076-0
File:
PDF, 422 KB
english, 2003