Micromachined polysilicon resonating xylophone bar magnetometer
D.K. Wickenden, J.L. Champion, R. Osiander, R.B. Givens, J.L. Lamb, J.A. Miragliotta, D.A. Oursler, T.J. KistenmacherVolume:
52
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0094-5765(02)00183-2
File:
PDF, 177 KB
english, 2003