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Evaluation of micromechanical properties of buckled SiOxNy-loaded membranes by combining the Twyman–Green interferometry with nanoindentation and point-wise deflection technique
Michal Józwik, Christophe Gorecki, Andrei Sabac, Patrick Delobelle, Małgorzata KujawińskaVolume:
41
Year:
2004
Language:
english
Pages:
14
DOI:
10.1016/s0143-8166(03)00027-7
File:
PDF, 617 KB
english, 2004