Interplay of voltage and temperature acceleration of oxide...

Interplay of voltage and temperature acceleration of oxide breakdown for ultra-thin oxides

E Wu, J Suñé, W Lai, E Nowak, J McKenna, A Vayshenker, D Harmon
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Volume:
59
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0167-9317(01)00629-3
File:
PDF, 215 KB
english, 2001
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