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Nano-scale analysis of precipitates in nitrogen-doped Czochralski silicon
G.A. Rozgonyi, A. Karoui, A. Kvit, G. DuscherVolume:
66
Year:
2003
Language:
english
Pages:
9
DOI:
10.1016/s0167-9317(02)00923-1
File:
PDF, 874 KB
english, 2003