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Preparation of 0.5 μm thick self-patternable PZT films by sol–gel procedure for applying to the micro-detection system
Jae-Seob Hwang, Woo Sik Kim, Hyung-Ho Park, Tae-Song KimVolume:
70
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0167-9317(03)00392-7
File:
PDF, 185 KB
english, 2003