Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment
1999 Vol. 438; Iss. 2-3
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Introduction of high oxygen concentrations into silicon wafers by high-temperature diffusion
G Casse, M Glaser, F Lemeilleur, A Ruzin, M WegrzeckiVolume:
438
Year:
1999
Language:
english
Pages:
4
DOI:
10.1016/s0168-9002(99)00869-4
File:
PDF, 138 KB
english, 1999