Study of nitrous oxide plasma oxidation of silicon nitride...

Study of nitrous oxide plasma oxidation of silicon nitride thin films

M Bose, D.K Basa, D.N Bose
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Volume:
158
Year:
2000
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(00)00023-4
File:
PDF, 164 KB
english, 2000
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