Growth of aluminium nitride on porous silica by atomic layer chemical vapour deposition
R.L Puurunen, A Root, P Sarv, S Haukka, E.I Iiskola, M Lindblad, A.O.I KrauseVolume:
165
Year:
2000
Language:
english
Pages:
10
DOI:
10.1016/s0169-4332(00)00440-2
File:
PDF, 197 KB
english, 2000