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Local laser induced rapid thermal oxidation of SOI substrates
M. Huber, R.A. Deutschmann, R. Neumann, K. Brunner, G. AbstreiterVolume:
168
Year:
2000
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(00)00591-2
File:
PDF, 165 KB
english, 2000