Structure and electrical property of platinum film biased dc-sputter-deposited on silicon
Kojima, Daisuke, Makihara, Kenji, Shi, Ji, Hashimoto, MituruVolume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00662-0
Date:
January, 2001
File:
PDF, 351 KB
english, 2001