Optical, electrical and structural properties of amorphous SiCN:H films prepared by rf glow-discharge decomposition
Nakaaki, I., Saito, N.Volume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00728-5
Date:
January, 2001
File:
PDF, 101 KB
english, 2001