The performance of the dry roots pump “DRYMAC” in LP-CVD silicon nitride process
Kanke, Yukio, Tanaka, Tomonari, Aikawa, Junichi, Yuyama, JunpeiVolume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00790-x
Date:
January, 2001
File:
PDF, 261 KB
english, 2001