Effects of surface roughness on gas flow conductance in...

Effects of surface roughness on gas flow conductance in channels estimated by conical roughness model

Sugiyama, W., Sawada, T., Yabuki, M., Chiba, Y.
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Volume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00792-3
Date:
January, 2001
File:
PDF, 163 KB
english, 2001
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