Effects of surface roughness on gas flow conductance in channels estimated by conical roughness model
Sugiyama, W., Sawada, T., Yabuki, M., Chiba, Y.Volume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00792-3
Date:
January, 2001
File:
PDF, 163 KB
english, 2001