Effect of mixing of hydrogen into nitrogen plasma

Applied Surface Science 2001 / 1 Vol. 169-170

Effect of mixing of hydrogen into nitrogen plasma

Hirohata, Y., Tsuchiya, N., Hino, T.
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Volume:
169-170
Language:
english
Pages:
5
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00799-6
Date:
January, 2001
File:
PDF, 204 KB
english, 2001
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