Etching of platinum thin films in an inductively coupled plasma
Wuu, Dong-Sing, Kuo, Nai-Hao, Liao, Fang-Ching, Horng, Ray-Hua, Lee, Ming-KweiVolume:
169-170
Language:
english
Pages:
6
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00803-5
Date:
January, 2001
File:
PDF, 284 KB
english, 2001