Modeling of outgassing or pumping functions of the constituent elements such as chamber walls and high-vacuum pumps
Yoshimura, NagamitsuVolume:
169-170
Language:
english
Pages:
4
Journal:
Applied Surface Science
DOI:
10.1016/s0169-4332(00)00813-8
Date:
January, 2001
File:
PDF, 122 KB
english, 2001