Low grain size TiN thin films obtained by low energy ion beam assisted deposition
J.M. López, F.J. Gordillo-Vázquez, O. Böhme, J.M. AlbellaVolume:
173
Year:
2001
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(00)00912-0
File:
PDF, 544 KB
english, 2001