Imaging of the structure of ultra-thin cobalt silicide films by inelastically backscattered electrons
I.I Pronin, D.A Valdaitsev, N.S Faradzhev, M.V Gomoyunova, P Luches, S ValeriVolume:
175-176
Year:
2001
Language:
english
Pages:
7
DOI:
10.1016/s0169-4332(01)00064-2
File:
PDF, 969 KB
english, 2001