Spectroellipsometric characterization of materials for multilayer coatings
K Postava, M Aoyama, T Yamaguchi, H OdaVolume:
175-176
Year:
2001
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(01)00163-5
File:
PDF, 121 KB
english, 2001