The influence of chemical treatments on tungsten films...

Applied Surface Science 2001 Vol. 180; Iss. 1-2

The influence of chemical treatments on tungsten films found in integrated circuits

Scott S. Perry, Heather C. Galloway, Paul Cao, Evelynn J.R. Mitchell, Debbie C. Koeck, Christopher L. Smith, Min Soo Lim
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Volume:
180
Year:
2001
Language:
english
Pages:
8
DOI:
10.1016/s0169-4332(01)00308-7
File:
PDF, 189 KB
english, 2001
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