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Study of precipitate in Si-rich SiO2 films
R.S Brusa, W Deng, G.P Karwasz, A Zecca, G Mariotto, P Folegati, R Ferragut, A DupasquierVolume:
194
Year:
2002
Language:
english
Pages:
6
DOI:
10.1016/s0169-4332(02)00097-1
File:
PDF, 139 KB
english, 2002