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Effect of in situ Pt bottom electrode deposition and of Pt top electrode preparation on PZT thin films properties
B Vilquin, G Le Rhun, R Bouregba, G Poullain, H MurrayVolume:
195
Year:
2002
Language:
english
Pages:
11
DOI:
10.1016/s0169-4332(02)00554-8
File:
PDF, 511 KB
english, 2002