Doubly versus singly positively charged oxygen ions...

Doubly versus singly positively charged oxygen ions back-scattered from a silicon surface under dynamic O2+ bombardment

Klaus Franzreb, Peter Williams, Jan Lörinčı&amp, #x0301, k, Zdeněk Šroubek
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Volume:
203-204
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(02)00648-7
File:
PDF, 112 KB
english, 2003
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