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Doubly versus singly positively charged oxygen ions back-scattered from a silicon surface under dynamic O2+ bombardment
Klaus Franzreb, Peter Williams, Jan Lörinčı&, #x0301, k, Zdeněk ŠroubekVolume:
203-204
Year:
2003
Language:
english
Pages:
4
DOI:
10.1016/s0169-4332(02)00648-7
File:
PDF, 112 KB
english, 2003