A floating low energy electron gun (FLEG) for charge compensation in SIMS and other applications
R. Gibbons, M.G. Dowsett, J. Kelly, P. Blenkinsopp, R. Hill, D. Richards, N. LoiblVolume:
203-204
Year:
2003
Language:
english
Pages:
5
DOI:
10.1016/s0169-4332(02)00673-6
File:
PDF, 340 KB
english, 2003