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H+, Na+, and K+ ion sensing properties of sodium and aluminum coimplanted LPCVD silicon oxynitride thin films
Paik-Kyun Shin, Thomas MikolajickVolume:
207
Year:
2003
Language:
english
Pages:
8
DOI:
10.1016/s0169-4332(02)01527-1
File:
PDF, 205 KB
english, 2003